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MEMSnet Home: MEMS-Talk: Cr wet etching
Cr wet etching
2011-07-19
Judith Linacero Blanco
2011-07-20
Ned Flanders
2011-07-20
Ned Flanders
2011-07-22
eowin rohan
2011-07-20
Salam Gabran
2011-07-22
Jaroslaw Syzdek
2011-07-22
Roger Shile
2011-07-22
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Cr wet etching
Judith Linacero Blanco
2011-07-19
Hi all,

Does anybody know how to etch Cr with PMMA mask with Cr wet etching? I have
300nmPMMA and I would like to etch 200nm of Cr. Do you know the etch rate
and the concentration of wet etching?

Thanks a lot.
reply
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