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MEMSnet Home: MEMS-Talk: Cr wet etching
Cr wet etching
2011-07-19
Judith Linacero Blanco
2011-07-20
Ned Flanders
2011-07-20
Ned Flanders
2011-07-22
eowin rohan
2011-07-20
Salam Gabran
2011-07-22
Jaroslaw Syzdek
2011-07-22
Roger Shile
2011-07-22
[email protected]
Cr wet etching
Ned Flanders
2011-07-20
Correction: I meant ceric ammonium NITRIDE etchant. Which also
contains perchloric acid. That orange stuff, in other words.

m

On 7/20/11, Ned Flanders  wrote:
> If you're using the famous ceric ammonium etchant, the etch rate for
> chromium is rather fast. I never measured it exactly, but 50 nm would
> be etched away in maybe 10-20 seconds at room temp.
>
>
> m
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