Yes, it is that orange stuff, but it is ceric ammonium NITRATE.

I agree with Ned about etch rate.

The recipe we use is as follows:
20 g Ce(NH4)2 (NO3)6
3.5 mL CH3COOH
and adding H2O till 100 mL

Eowin.



________________________________
Från: Ned Flanders 
Till: General MEMS discussion 
Skickat: ons 20 juli 2011 3:40:45
Ämne: Re: [mems-talk] Cr wet etching

Correction: I meant ceric ammonium NITRIDE etchant. Which also
contains perchloric acid. That orange stuff, in other words.

m