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MEMSnet Home: MEMS-Talk: Cr wet etching
Cr wet etching
2011-07-19
Judith Linacero Blanco
2011-07-20
Ned Flanders
2011-07-20
Ned Flanders
2011-07-22
eowin rohan
2011-07-20
Salam Gabran
2011-07-22
Jaroslaw Syzdek
2011-07-22
Roger Shile
2011-07-22
[email protected]
Cr wet etching
Roger Shile
2011-07-22
Nitrite? That's a new one on me, but whatever works...  I've used a
formulation containing Ceric ammonium nitrate to etch Cr.

Roger Shile

-----Original Message-----
Subject: Re: [mems-talk] Cr wet etching

it is a nitrite. Cerium-ammonium nitride does not exist (there would be
immediate proton transfer from NH4+ to N3-, and the whole thing would
either
explode, or at least heat up a lot)

Jaroslaw Syzdek
Ernest Orlando Lawrence Berkeley National Laboratory
Environmental Energy Technologies Division
Advanced Energy Technology
1 Cyclotron Road MS70R0108B Room 193
Berkeley, CA 94720-8168 (GMT-8)
United States of America
tel1: +1 510 486 4678
tel2: +1 510 486 4360
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www.lbl.gov
http://eetd.lbl.gov/staff/syzdek-j.html
https://sites.google.com/a/lbl.gov/jarek/
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