A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: intermediate material for single crystal wafer dicing
intermediate material for single crystal wafer dicing
2011-07-22
Maggie Liang
2011-07-22
Felix Lu
2011-07-22
Roger Shile
2011-07-23
Andrea Mazzolari
intermediate material for single crystal wafer dicing
Felix Lu
2011-07-22
Hi Maggie,

   You might try crystal wax, or black wax...

Felix


[email protected]


________________________________
From: Maggie Liang 
To: [email protected]; [email protected]
Sent: Friday, July 22, 2011 2:42 PM
Subject: [mems-talk] intermediate material for single crystal wafer dicing

Hi,

I'd like to use an intermediate material to "bond" device wafer to dummy Si
wafer for dicing. The "bonding" strenth may not be very strong.

The main goals are to reduce chipping on the device wafer during dicing, and
easy to clean at the same time. positive photoresist could be an option..  Does
any one know any material that is suitable for this application? It could be low
cost, not toxicate,  and easy for cleaning

Thanks a lot!
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Mentor Graphics Corporation
MEMS Technology Review
University Wafer
The Branford Group