intermediate material for single crystal wafer dicing
Felix Lu
2011-07-22
Hi Maggie,
You might try crystal wax, or black wax...
Felix
[email protected]
________________________________
From: Maggie Liang
To: [email protected]; [email protected]
Sent: Friday, July 22, 2011 2:42 PM
Subject: [mems-talk] intermediate material for single crystal wafer dicing
Hi,
I'd like to use an intermediate material to "bond" device wafer to dummy Si
wafer for dicing. The "bonding" strenth may not be very strong.
The main goals are to reduce chipping on the device wafer during dicing, and
easy to clean at the same time. positive photoresist could be an option.. Does
any one know any material that is suitable for this application? It could be low
cost, not toxicate, and easy for cleaning
Thanks a lot!