I've used CrystalBond to mount wafers for dicing.  Brewer Science has
several products including Protek and WaferBond that might be suitable.

Roger Shile

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of
Maggie Liang
Sent: Friday, July 22, 2011 11:42 AM
To: [email protected]; [email protected]
Subject: [mems-talk] intermediate material for single crystal wafer
dicing

Hi,

I'd like to use an intermediate material to "bond" device wafer to dummy
Si wafer for dicing. The "bonding" strenth may not be very strong.

The main goals are to reduce chipping on the device wafer during dicing,
and easy to clean at the same time. positive photoresist could be an
option..  Does any one know any material that is suitable for this
application? It could be low cost, not toxicate,  and easy for cleaning

Thanks a lot!