You can try using SU 8 2000.5 or 2002 and adjust you spin coat parameters in
order to get 1 micron thickness.

________________________________
From: Ned Flanders 
To: General MEMS discussion 
Sent: Friday, August 5, 2011 2:14 AM
Subject: [mems-talk] Recommend a negative resist

....something that could be patterned to resolutions of 1 um or better.
Also, the budget is not unlimited.