Also for 1 micron resolution, thick SU 8 resist will induce lot of stress in the
film. Hence use a very thin SU 8 film may be upto 2 microns thick.

________________________________
From: gau s 
To: "[email protected]" ; General MEMS discussion

Sent: Friday, August 5, 2011 10:24 AM
Subject: Re: [mems-talk] Recommend a negative resist


You can try using SU 8 2000.5 or 2002 and adjust you spin coat parameters in
order to get 1 micron thickness.