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MEMSnet Home: MEMS-Talk: Recommend a negative resist
Recommend a negative resist
2011-08-05
Ned Flanders
2011-08-05
Kevin Nichols
2011-08-06
Ned Flanders
2011-08-06
Bill Moffat
2011-08-06
Kevin Nichols
2011-08-07
Ned Flanders
2011-08-06
Xiaohui Lin
2011-08-05
gau s
2011-08-05
gau s
Recommend a negative resist
Xiaohui Lin
2011-08-06
NR9 should be what you are looking for.

On Sat, Aug 6, 2011 at 3:18 AM, Ned Flanders  wrote:

> Thanks, but I need something that I can easily strip. That excludes SU-8.
>
> As for how thick: well, since I need 1 um resolution or better, it
> should be thinner than 1 um.
>
> m

Lin, Xiaohui
Ph.D. Program in Electrical and Computer Engineering
Nanophotonics and Optical Interconnects Group
Microelectronics Research Center
The University of Texas at Austin
E-mail: [email protected]
Office: (512) 471-4349
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