OXIDE rie will do it

Shay

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Xiaohui
Lin
Sent: Thursday, August 11, 2011 2:08 AM
To: General MEMS discussion
Subject: [mems-talk] Dry etch 50nm Au film, possible?

Hi all: Is it possible to use any dry etch receipt to etch Cr/Au film
(50nm)?

The mask of etching is Ni.