Roger,

I can't explain but it just happens (I wish it didn't) I think it's somehow
very effective ion milling but it's way too fast to be it.

Shay

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Roger
Shile
Sent: Thursday, August 11, 2011 7:53 PM
To: General MEMS discussion
Subject: Re: [mems-talk] Dry etch 50nm Au film, possible?

Please explain.

Roger Shile