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MEMSnet Home: MEMS-Talk: spinning su8 over az9260
spinning su8 over az9260
2011-08-15
sumit kalsi
spinning su8 over az9260
sumit kalsi
2011-08-15
 Hi All,

I am trying to spin coat SU8 on glass substrate coated with AZ9260. Has
ayone done anything similar to this? how should I decide the soft baking
temperature and times, exposure dosage?

Many thanks

Kind Regards,
Sumit
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