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MEMSnet Home: MEMS-Talk: Sol gel
Sol gel
2011-09-09
Kuijpers, Peter
Sol gel
Kuijpers, Peter
2011-09-09
Hi all,

Does anyone have experience in spincoating SiO2 sol gel solution?
Desired film thickness is app. 5µm.

Any help is very much appreciated.


Peter Kuijpers
Process Engineer
Philips Innovation Services
Email: [email protected]
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