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MEMSnet Home: MEMS-Talk: Chamber
Chamber
1999-06-01
ZHANG YANHANG
Chamber
ZHANG YANHANG
1999-06-01
Morning everybody!

I am a graduate student at CU-Boulder. I use interferometric microscope
(Zygo, NewView 200) to characterize the surface deformation of MEMS
structures. Zygo produces a picture of the surface profile of MEMS
structures. Now I want to heat up the specimen. I am trying to build up a
chamber, because I want to have a precise controll of the temperature of
the specimen and also I don't want to destroy the optics of the
microscope. This bears the question: can I still obtain a picture through
the window of the chamber?

Is there anybody who has ever done such kind of reserch or knows where
I can buy a chamber used for the microscope or has any suggestions on
building up a chamber? I would appreciate any suggestions or comments.

Thanks a lot!

Yanhang


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