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MEMSnet Home: MEMS-Talk: ALD liftoff and underneath contact solution
ALD liftoff and underneath contact solution
2011-09-15
Roy Yang
2011-09-15
Alex Mellnik
2011-09-15
Roy Yang
2011-09-19
Bill Moffat
2011-09-19
Wilson, Thomas
2011-09-21
Bill Moffat
ALD liftoff and underneath contact solution
Roy Yang
2011-09-15
Dear community,

I have read information about the liftoff of ALD insulator (
http://marcuslab.harvard.edu/papers/Biercuk_ALD_APL.pdf). In the paper they
have also reported the electrical measurement of a triple layer capacitor
consisting of Pt-insulator-Pt. My question is, what can be the easiest way
to electrically access the bottom contact layer right under the ALD wrap?
Thanks a lot and welcome any comments if you happen to know more details
about the measurement done in that paper.

Best,

Josh
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