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MEMSnet Home: MEMS-Talk: SU 8 brittle: does type of resist/thickness matter?
SU 8 brittle: does type of resist/thickness matter?
2011-09-28
sumit kalsi
SU 8 brittle: does type of resist/thickness matter?
sumit kalsi
2011-09-28
Dear All,

I need a sheet of SU8 (~50um) to be clamped in teflon. But the released SU8 is
brittle. I had been suggested to reduce the baking temperature but it did not
help much. I am using SU8-50, does the use of SU8 3000 series be any good or SU8
2000? Should I decrease the thickness of the resist film?

Thanks a lot.

Kind Regards,
Sumit
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