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MEMSnet Home: MEMS-Talk: Ma-N400 resist for lift-off
Ma-N400 resist for lift-off
2011-10-04
Shane GUO
2011-10-05
Matthieu Nannini, Dr.
2011-10-07
Shane GUO
Ma-N400 resist for lift-off
Shane GUO
2011-10-04
Hello,

Does anyone have experience of using Ma-N400 series negative resist for lift-off
process? Without ultrasonic bath, is it possible to get a clean lift-off result
for Ti/Au (10nm/100nm)?  I am using Rem660 remover at 80C, but I cannot see
metal removed in 10mins. Should it take longer time?

Thanks
reply
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