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MEMSnet Home: MEMS-Talk: ultra thin silicon membranes
ultra thin silicon membranes
2011-10-07
Andrea Mazzolari
2011-10-08
Marc Reinig
2011-10-08
Andrea Mazzolari
ultra thin silicon membranes
Andrea Mazzolari
2011-10-07
Hi All,

I'm looking for information on ultra-thin silicon membranes (thickness less
than 500nm).
In particular I'm looking for

1) papers which describes realization of such membranes, up to now I've
found only
Journal of the Korean Physical Society, Vol. 53, No. 2, pp. 579-583
J. Vac. Sci. Technol. B 28(1)

2) applications of ultra-thin silicon membranes

Is there any suggestion on this topic ?

Thanks in advance,
Andrea Mazzolari

reply
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