Hi All,
I'm looking for information on ultra-thin silicon membranes (thickness less
than 500nm).
In particular I'm looking for
1) papers which describes realization of such membranes, up to now I've
found only
Journal of the Korean Physical Society, Vol. 53, No. 2, pp. 579-583
J. Vac. Sci. Technol. B 28(1)
2) applications of ultra-thin silicon membranes
Is there any suggestion on this topic ?
Thanks in advance,
Andrea Mazzolari