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MEMSnet Home: MEMS-Talk: Recipe of Ar plasma etching gold
Recipe of Ar plasma etching gold
2011-10-12
Yingtao Tian
2011-10-12
Bill Moffat
2011-10-12
Matthieu Nannini, Dr.
2011-10-12
志修 梁
2011-10-12
Yingtao Tian
2011-10-13
Kirt Williams
2011-10-30
Khaled Mohamed Ramadan
2011-10-31
Kirt Williams
Recipe of Ar plasma etching gold
Yingtao Tian
2011-10-12
Hello everyone,

Can anybody give a recipe of Ar plasma etching Au and Cr? I have a double layer
of Cr/Au about 100nm to remove but have no experience with this before..
Appreciate if you could share the recipe.

thanks,
Yingtao
reply
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