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MEMSnet Home: MEMS-Talk: P+ etch stop
P+ etch stop
1995-11-14
Alexander Barr
P+ etch stop
Alexander Barr
1995-11-14
Hello,

I am currently trying to make a silicon cantilever (8000A thick) and will be
needing to do a p+ stop etch. Unfortunately, I cannot dope my wafers with the
necessary boron concentration given the available facilities at the University
of Texas.

Does anyone know of any Universities or companies that can be contracted out to
do the boron diffusion or implant step for a couple of wafers.

Thanks.

ALEXANDER BARR ( Grad. Student Dept. of Physics)
[email protected]


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