Ar plasma will not etch Au, Cr, or for that matter anything.  Argon is inert and
even when activated as a plasma will not etch.  It can sputter off a very small
amount of material, but not chemically etch.  Try liftoff or high power RIE.
Bill Moffat

-----Original Message-----
From: [email protected] [mailto:mems-
[email protected]] On Behalf Of Yingtao Tian
Sent: Wednesday, October 12, 2011 3:57 AM
To: General MEMS discussion
Subject: [mems-talk] Recipe of Ar plasma etching gold

Hello everyone,

Can anybody give a recipe of Ar plasma etching Au and Cr? I have a double layer
of Cr/Au about 100nm to remove but have no experience with this before...
Appreciate if you could share the recipe.

thanks,
Yingtao