A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Cross section view of SEM image
Cross section view of SEM image
2011-11-07
ning xue
2011-11-07
Roger Shile
2011-11-08
Jack
2011-12-15
Yunda Wang
2011-12-15
Lou Chomas
Cross section view of SEM image
ning xue
2011-11-07
Hi,

I am planing to have a look at the cross section of my deep silicon etching
sample by SEM. I found that it is really difficult to manually cut the
slicon sample right along the diameter of the etcher hole. Is there any
good way to cut the wafer nicely and the cut side goes through the center
of etched hole?

Thanks
Ning
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Tanner EDA by Mentor Graphics
The Branford Group
MEMStaff Inc.
Process Variations in Microsystems Manufacturing