Hi all,

What is the energy you've used?

regards,

Peter Kuijpers
Process Engineer
Philips Innovation Services
MiPlaza/TL group
High Tech Campus 04-p5.12
5656 AE Eindhoven
The Netherlands
Phone: +31 402743667
Mobile:+31 612507027, Mobex: +31 402798904
Email: [email protected]


-----Original Message-----
From: [email protected] [mailto:mems-
[email protected]] On Behalf Of Xiaohui Lin
Sent: Wednesday 9 November 2011 6:01
To: General MEMS discussion
Subject: [mems-talk] Help with SU8 2005 recipe on glass substrate

I am using SU8 2005 on 1mm thick glass substrate coated with 50nm Cr/Au.

spin coat 4krpm
bake 95C, 3min
exposure 8s
PEB:   65C, 7min
develop: 40s

I am getting a pretty rough sidewall as the picture in the following link.

Could anyone suggest what is the problem?

Thanks.

https://plus.google.com/u/0/photos/113316121597573259487/albums/5672855410267307
473