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MEMSnet Home: MEMS-Talk: Help with SU8 2005 recipe on glass substrate
Help with SU8 2005 recipe on glass substrate
2011-11-09
Xiaohui Lin
2011-11-09
Kuijpers, Peter
2011-11-09
Xiaohui Lin
2011-11-10
Andrew Sarangan
2011-11-10
Xiaohui Lin
2011-11-12
Khaled Mohamed Ramadan
2011-11-10
Jin Yu
Help with SU8 2005 recipe on glass substrate
Khaled Mohamed Ramadan
2011-11-12
try developing it for more time
30 seconds in developer
another 30 seconds in fresh developer
then IPA for 30 seconds
also increase the dose alittle bit


On Fri, Nov 11, 2011 at 1:11 AM, Xiaohui Lin wrote:

> could you advise what is adequate rinsing? I dip in SU8 developer for
> 20-30s then rinse with IPA. Is it the correct step?
>
> I do notice the white stains if under-develop, for example, IPA rinse after
> just 10s developing.
>
>
> Thanks.
reply
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