https://lh6.googleusercontent.com/-svOBwLQuAXk/TsRyKCq3HqI/AAAAAAAAACM/Y07BUFTq6
ok/s912/SU8_2005_1114_onSi_10s09.jpg

Hi :   I am processing SU8 2005 on Silicon. But the shape is not what I
expected. There are tailing towards the trench at the foot the SU8, as the
picture shown in the link above. Could anyone suggest what I can do to
eliminate the tailing?

Thanks