Hi Alessandro,

At our location we use parylene for this, with good results.

Regards,

Peter Kuijpers
Process Integrator
Philips Innovation Services
MiPlaza/TL group
High Tech Campus 04-p5.12
5656 AE Eindhoven
The Netherlands
Phone: +31 402743667
Mobile:+31 612507027, Mobex: +31 402798904
Email: [email protected]

-----Original Message-----
From: [email protected] [mailto:mems-
[email protected]] On Behalf Of Alessandro
Distefano
Sent: Thursday 17 November 2011 20:15
To: [email protected]
Subject: [mems-talk] PZT in KOH

Hi all,

I need your help.

Someone know how to protect a PZT layer deposited by sol-gel (about 400nm) on
a Ti-Pt electrode substrate of Si in KOH etching (15% solution, 85 ° C),
avoiding under-attack ?

I tried some solution but with poor results:

1. photoresist about 10um -> failed
2. ProTEK on PZT -> failed
3. mechanical clamping on a sample holder -> failed I need to work with
fragile membranes

Anyone has some advice?

Thank you
Alessandro