Hi,
Have you used Contact Lithography?

Then may be there was some gap between your mask and the substrate.

Also what process parameters have you used? It can also be because of under-
exposure.



________________________________
 From: Xiaohui Lin 
To: General MEMS discussion 
Sent: Wednesday, November 16, 2011 8:36 PM
Subject: [mems-talk] SU8_2005 tailing at foot


https://lh6.googleusercontent.com/-svOBwLQuAXk/TsRyKCq3HqI/AAAAAAAAACM/Y07BUFTq6
ok/s912/SU8_2005_1114_onSi_10s09.jpg

Hi :   I am processing SU8 2005 on Silicon. But the shape is not what I
expected. There are tailing towards the trench at the foot the SU8, as the
picture shown in the link above. Could anyone suggest what I can do to
eliminate the tailing?

Thanks