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MEMSnet Home: MEMS-Talk: cracks or wrinkles on photoresist (AZ4620) sacrificial layer
cracks or wrinkles on photoresist (AZ4620) sacrificial layer
2011-11-20
Yuksek, Nuh S. (MU-Student)
2011-12-15
Yunda Wang
cracks or wrinkles on photoresist (AZ4620) sacrificial layer
Yuksek, Nuh S. (MU-Student)
2011-11-20
Hi,

I use AZ4620 as a sacrificial layer and deposit a Cr/Au layer on top of
patterned 10-15 micron thick AZ4620 by RF sputtering. When I remove the samples
from the sputtering chamber I can clearly see that the metal film is cracked in
50-100 micron size pieces completely ant that affects the reflection from the
surface. Sometimes I see very rough wrinkles on the film.

Has anyone faced this problem and how can I overcome this issue? What may cause
this crack or wrinkle issue?

NSadi
reply
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