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MEMSnet Home: MEMS-Talk: e-beam sio2 to Kapton
e-beam sio2 to Kapton
2011-11-27
Shane GUO
2011-11-28
Shane GUO
2011-11-29
Michael Martin
e-beam sio2 to Kapton
Shane GUO
2011-11-27
Hello all,

I recently evaporate 200nm SiO2 by e-beam to Kapton sheet. It looks fine after
evaportation. However, after heating at 80C for 1hr, I can see some powders
(golden color) on the SiO2 layer and it seems the SiO2 does not adhere to Kapton
very well. The SiO2/powder could be scrached off by hand. My questions are,

1. What are those powder like golden color things?
2. Can I use a Ti layer as a seed layer and e-beam SiO2 on top of it to improve
adhesion, as I found Ti adheres very well to Kapton.

Thank you in advance.
reply
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