Oh, that makes more sense.  However, at 100nm, there should be more than enough
gold.  The problem is probably that without an adhesion layer, the film is not
continuous.  And thus, electrical conductivity is unreliable.

Do let us know the results of your next test.

Dan

From: Shane GUO [mailto:[email protected]]
Sent: Monday, December 05, 2011 4:34 PM
To: Ruiz, Marcos Daniel (SGNCOE); General MEMS discussion
Subject: Re: [mems-talk] e-beam evaporation of gold

Hi Marcos,

Thanks for your prompt reply.

I have to change the typo in my last few sentences. My question is if the
problem is caused by a too thin gold layer or the lacking of adhesion layer?

I will try to add an adhesion layer to see how it changes the yield.

Thanks