Hi anybody knows the material properties of the :
E [Young's modules] Alpha [thermal exp coefficient]
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Platinum
Chromium
Silicondioxide
Thanks.
Mehmet.
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University of Minnesota
Thermal Management of Electronic Systems
Department of Mechanical Engineering
111 Church Street, Minneapolis
MN 55455 USA
Office/LAB: ME458
Phones: (612) 626-9551 Office/LAB
625-2612 Microtechnology Laboratory
378-2747 Home
Fax: (612) 624-1398
http://webster.me.umn.edu/~arik
Stay cool, Listen CURE, and Have a nice spring
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On Thu, 27 May 1999, Reimer, Klaus wrote:
> Dear Dr. Johnson,
>
> concerning your e-mail you send around on May, 20th, where you asking
> for other options for grayscale lithography than Canyon Materials'HEBS,
> I can answere with YES.
>
> At ISIT we improve and apply graytone lithography utilizing an
> inexpensive one-step lithographic method using a raster-screend
> (graytone) quartz-Cr reticle, with subresolution pixel elements. This
> typ of mask you can get at any commercial mask shop and you are able to
> mix graytone structures with digital once. Graytone specific is only the
> design of the subresolution pixel arrays. For this we developed a
> software tool called GRADED which we use in house. This tool takes
> account of all nonlinear process characteristics which happens during
> the graytone exposure like e.g. resist contrast. In addition we have a
> resist process available allowing thicknesses up to 20 um. Combining
> these two technologies we are able to fabricate fluid jets, shaped
> electrodes for electrostatic drives, shaped mirrors, shaped gratings,
> refractive and diffractive optical elements. We also transfere this
> structures in silicon e.g. for IR-applications or make replicas of these
> structures in Polycarbonat together with an industrial partner.
>
> For more detailed information there are some publications available:
> - Proc. SPIE Vol. 3008, p. 279-299, San Jose 1997
> - Proc. SPIE Vol. 3226, p. 6, Austin, 1997
> - Proc. of Int. Conf. on Optic & Electronics at IRDE, India, 9-12 Dec,
> 1998
>
> or look at our web-side:
> http://www.isit.fhg.de/english/mst/DOE.html
> http://www.isit.fhg.de/english/mst/graytone.html
>
> I you have some more questions, please do not hesitate to phone or
> e-mail me.
>
> Kind Regards
>
> Klaus Reimer
>
> _____________________________________
> Dr. Klaus Reimer
> Fraunhofer-Institut f|r Siliziumtechnologie
> Fraunhoferstrasse 1
> D-25524 Itzehoe
> Germany
> Tel.: +49 4821 174506
> FAX +49 4821 174251
> e-Mail [email protected]
> Internet http://www.isit.fhg.de
> ___________________________________________
>
>
>
