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MEMSnet Home: MEMS-Talk: e-beam evaporation of gold
e-beam evaporation of gold
2011-12-05
Shane GUO
2011-12-06
Ruiz, Marcos Daniel (SGNCOE)
2011-12-06
Shane GUO
2011-12-06
Ruiz, Marcos Daniel (SGNCOE)
2011-12-07
Michael Martin
2011-12-06
Shane GUO
e-beam evaporation of gold
Michael Martin
2011-12-07
If that doesn't work you might consider swelling of the polymer during wet
processing such as the Au etch.

On Tue, Dec 6, 2011 at 12:48 PM, Ruiz, Marcos Daniel (SGNCOE) <
[email protected]> wrote:

> Oh, that makes more sense.  However, at 100nm, there should be more than
> enough gold.  The problem is probably that without an adhesion layer, the
> film is not continuous.  And thus, electrical conductivity is unreliable.
>
> Do let us know the results of your next test.
>
> Dan
reply
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