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MEMSnet Home: MEMS-Talk: Image reversal process on microscope lamel
Image reversal process on microscope lamel
2011-12-10
Selda Sonusen
2011-12-20
Brad Cantos
2011-12-21
Matthieu Nannini, Dr.
Image reversal process on microscope lamel
Selda Sonusen
2011-12-10
Hello All,

I am trying to  do image reversal process on transparent substrate (microscope
lamel). I am using recipe which works for SiO2 and GaAs,But when I develop lamel
and put it on DI water all resist go away for image reversal,But I can do
positive lithography on again microscope lamel. I can achieve mask pattern.  Do
you have any idea?  Thanks
reply
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