Hi everyone,
In MEMS Design, someone maybe want to design
a device, just like the micro-switch, that has 2MHz
frequency. What does it mean?(resonant frequency or
others)... If we want to use some simulation tools
such as IntelliCAD, ANSYS or Sugar to predict the
micro-device performances, what should we need to
do? ( mode analysis ..or others)
Thank you very much!
sincerely,
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Yu-Chen Lin
National Chiao-Tung University, HsinChu, Taiwan