Hi Mike, would you consider "Black Silicon"?
Anyone with a deep RIE system can treat your wafers to form a black silicon
'grass' on horizontal exposed silicon surfaces. The black silicon process is
frequently used in tuning the process for best vertical sidewalls.
* High broadband optical absorption.
I don't know the spectral range of absorption, but it is really black, black,
black.
* Spin coatable.
No, but is that a performance requirement or an artifact of the existing process
sequence?
*
Electrical resistivity as high as possible.
As etched the 'grass' is conductive, but a thin oxide or nitride layer can
passivate it.
*
Patternable.
Simple. Only open the areas you want to blacken to the RIE.
* Long life.
As long lived as the silicon in the rest of the device.
I think I might be able to intercede with a fab to get samples run, if you are
interested.
Best,
Dean Hopkins
(408) 429-0501