Hi Gary,

What did you mean 'expose the material properly'?

Sorry to mention that the exposure dose is calculated by multiplying the time
and intensity of 10 mJ/cm2. So, my exposure dose ranged from 70 mJ/cm2 to 100
mJ/cm2.

Please comment either the dose is too low or too high.

Thanks,

Yingtao
________________________________________
From: [email protected] [mems-talk-
[email protected]] On Behalf Of Gary Hillman
[[email protected]]
Sent: 10 January 2012 20:35
To: 'General MEMS discussion'
Subject: Re: [mems-talk] SU-8 process development

Sounds like you did not expose the material properly. Gary