Hi Kevin,
Very good point, thanks a lot for the link. I should try to reduce the exposure
dose.
Yingtao
________________________________________
From: [email protected] [mems-talk-
[email protected]] On Behalf Of Kevin Nichols
[[email protected]]
Sent: 11 January 2012 13:53
To: General MEMS discussion
Subject: Re: [mems-talk] SU-8 process development
Shay's right. If an AR coating won't work though, the data sheets for
SU-8 address this under the "relative dose" tables. In the datasheet
for SU-8 3000, for example, this is given in Table 4:
http://www.microchem.com/pdf/SU-8%203000%20Data%20Sheet.pdf
Table 4: RELATIVE DOSE
Silicon 1X
Glass 1.5X
Pyrex 1.5X
Indium Tin Oxide 1.5X
Silicon Nitride 1.5 - 2X
Gold 1.5 - 2X
Aluminum 1.5 - 2X
Nickel Iron 1.5 - 2X
Copper 1.5 - 2X
Nickel 1.5 - 2X
Titanium 1.5 - 2
- Kevin
