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MEMSnet Home: MEMS-Talk: Stiffening effect in silicon nitride?
Stiffening effect in silicon nitride?
1999-06-08
Robert Kazinczi
Stiffening effect in silicon nitride?
Robert Kazinczi
1999-06-08
Dear Everyone,

I measure gradually increasing Young's modulus in silicon nitride
cantilevers during resonant aging. The cantilever beams are driven on
resonant frequency at reasonably low amplitude for days. The size of the
beam is approx. 100x20x0.3 micrometer. I would expect lower Young's modulus
due to cracks, instead of stiffening. Did anyone measure the same tendency,
or can help me understanding this behavior?
Thanks in advance.

Robert Kazinczi


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