Hello All,
We are looking urgently for advices and/or reprints from papers concerning
damages on ICs during Si/glass anodic bonding. Leakage currents on
p-n-junctions are from special interest. Any help will be deeply
appreciated. Thanks in advance.
Dr. Roumiana Paneva
X-FAB GmbH
Haarbergstasse 61
D-99097 Erfurt
Deutschland
Tel: (+49) 361 42 053 21
FAX: (+49) 361 42 053 11