A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Low temperature Al-Al bonding
Low temperature Al-Al bonding
2012-02-03
Pietro Maoddi
2012-02-06
Matthieu Nannini, Dr.
2012-02-06
Pietro Maoddi
2012-02-07
Pietro Maoddi
2012-02-07
Tony Rogers
Low temperature Al-Al bonding
Pietro Maoddi
2012-02-07
Hello,

I considered that option but it seems a little homebrew: the SB6 alignment
jig  is kind of delicate
and not fit for putting weights on it (the wafers are clamped in the center
of a ring), so I would have to somehow remove the wafers from the jig
without losing alignment to put them in an oven.

That's why I'm looking for a more "industrial" technique.

Best,
Pietro
2012/2/6 Matthieu Nannini, Dr. 

> Why don't you do your original idea but after alignment instead of using
> the bonder, use a regular oven with a weight ?
>
> Matthieu
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
The Branford Group
Nano-Master, Inc.
MEMS Technology Review
Addison Engineering