Sputtered oxide as KOH anisotropic wet etching mask
Andrew Sarangan
2012-02-14
For 1um etch, sputtered oxide may last just long enough to make it work.
But you may see pin holes in the masked areas.
On Mon, Feb 13, 2012 at 5:45 PM, Tim Eschrich wrote:
> Silicon nitride works better with KOH, you should find the etch rate is
> lower for oxide if you use TMAH.