Dear WangYou can also try development with AZ 400K.

Regards.
---

> From: [email protected]
> To: [email protected]
> Date: Tue, 14 Feb 2012 01:11:17 +0000
> Subject: Re: [mems-talk] AZ5214E as positive resist
>
> Dear all,
>
> Thanks a lot for your kind advice. It seems that the problem lies in the high
baking temperature and the use of HMDS. I'll try to make new samples according
to your advice.
>
> All the best,
>
> WANG, Yingnan