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MEMSnet Home: MEMS-Talk: AZ5214E as positive resist
AZ5214E as positive resist
2012-02-13
Yingnan Wang
2012-02-13
Yingtao Tian
2012-02-13
Shay
2012-02-13
Enrique San Andrés
2012-02-13
Wei Cheng
2012-02-13
Felix Lu
2012-02-14
Yingnan Wang
2012-02-15
basar bolukbas
2012-02-13
Jin Yu
AZ5214E as positive resist
basar bolukbas
2012-02-15
Dear WangYou can also try development with AZ 400K.

Regards.
---

> From: [email protected]
> To: [email protected]
> Date: Tue, 14 Feb 2012 01:11:17 +0000
> Subject: Re: [mems-talk] AZ5214E as positive resist
>
> Dear all,
>
> Thanks a lot for your kind advice. It seems that the problem lies in the high
baking temperature and the use of HMDS. I'll try to make new samples according
to your advice.
>
> All the best,
>
> WANG, Yingnan
reply
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