Hello All,

Is anyone familiar with resists sensitive to EUV/soft x-ray light. I
have tried a few resist commercially available, having the best
results with AZPN114 (chemically amplified resist unfortunately for me
discontinued). I'm trying PMMA, SU-8 and HSQ without much success.
They all are euv sensitive however, PMMA and su-8 can be activated
only to ~20nm depth. HSQ is a bit better however its a princess
(expensive, unstable, short shelve lifetime). So here I am, looking
for alternatives,  chemically amplified resists (CAR) seem most
promising. Any ideas?

Thanks for your time,
-Lukasz