I am interested in using a metal as an etch stop for a dry etch of Silicon
Nitride, and I am looking for the following:

     1)  Can a metal be used as an etch stop for dry etching of PECVD
Si3N4; if so, which metals?
     2)  Does PECVD Si3N4 on metal adhere, grow, hermetically seal, and
stay structurally sound under bending load?

Supporting literature is very much appreciated!

Additional Process Details
  1) LPCVD Si3N4
  2) A metal
  3) PECVD Si3N4
  4) ICP Etch of PECVD layer down to the metal


Thank you in advance for your help,
Kipp Scheonwald
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