Dear MEMS members,

Now, I want to know the thermal conductivity
of PECVD silicon oxynitride, SiON.

Depo. temp. is 450 degree.
Thickness is 0.7 micro-meter.

Does anyone know databases or web-pages or papers
about that.

Thanks.
--
 $B"#""!! (BFUJII Mitsuru
 $B"""#!! ([email protected]