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MEMSnet Home: MEMS-Talk: week adhesion of SU8 to glass or quartz
week adhesion of SU8 to glass or quartz
2012-03-06
Xiaohui Lin
2012-03-07
Kipp Schoenwald
2012-03-07
Xiaohui Lin
week adhesion of SU8 to glass or quartz
Kipp Schoenwald
2012-03-07
HMDS has worked for me on both Pyrex and Quartz.  I suspect it should work
on glass just as well.

Kipp

On Tue, Mar 6, 2012 at 4:37 PM, Xiaohui Lin wrote:

> hi all:
>
>    Could any one suggest how to improve the adhesion of SU8 2005 to glass
> or quartz?
>
>     I tried glass+omnicoat+SU8, it is week. I also tried
> quartz+omnicoat+SU8 , but still peel off when I put in plating solution
> (pH=5).
>
>    Will HMDS work? or other adhesion promoter?
>
> thanks
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