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MEMSnet Home: MEMS-Talk: wax for KOH etching
wax for KOH etching
1995-11-14
Dr. Kevin Walsh
wax for KOH etching
Dr. Kevin Walsh
1995-11-14
Can anyone provide me with some information about a wax that is compatible with
KOH etching. I am interested in waxing down a device silicon wafer to a surface
(such as glass) to protect the device side while the back side is exposed to
KOH for an extended period of time.

Thanks,
Dr. Kevin M. Walsh
Electrical Engineering Department, Speed Scientific School
University of Louisville, Louisville, KY 40292
(502) 852-0826
Internet address: [email protected]


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