you can try cleaning in megasonic or dicing with a tape on both sides. it is
sometime tricky to remove the top tape since you have to somwhow get hold of it
at a corner to start pulling.

----- Original Message -----
From: ProtoSi Info 
Date: Wednesday, July 25, 2012 0:08
Subject: [mems-talk] dicing particle contamination
To: [email protected]

> Hello
>
> We've been struggling with particles getting embedded in our delicate
> silicon comb structures during dicing. Our current process involves
> spraying on a 10um thick layer of photoresist over the entire
> wafer and
> then do a soft bake. After dicing we rinse the wafer to remove
> particlesbefore stripping off the resist. However we're still
> getting particles
> stuck in-between the comb fingers. We've attempted ultrasonic
> cleaning but
> that damages the combs.
>
> Any tips to remove or prevent particles would be greatly appreciated.
>
> Thank you
> Kevin Chang
> ProtoSi
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