Hello ZhengWei,

We are using Ti as the adhesion layer in our gyro development. It  works
well with glass. There should be no problem with the adhesion of metal Cr to
glass because people usually use Ti or Cr to enhance the stickability. I
suggest you'd better check the cleaness of your glass surface before you
deposit. BTW, what's the glass are you using?

Hope it helps.

Yahong

>From: zw 
>Reply-To: zw , [email protected]
>To: [email protected]
>Subject: help!
>Date: Thu, 10 Jun 1999 11:24:34 +0800
>
>Hi, dear colleagues,
>Now I'm trying to making out a MEMS gyroscope. But encounter some
>problem about improving adhesion of metal film(Cr) deposited on glass
>wafer.  Is there anyone can help me?
>Thank you very much!!!!!!!!
>
>zhengwei
>
>[email protected]
>
>
>


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