I am looking for design files (GDSII, DXF, or similar) for standard
Guckel rings (to bracket stress/stress gradient in thin films). I'm
also looking for design files for related stress-characterization
structures (e.g. cantilevers), similar to those developed by Bill Sharpe
and his colleagues. Or, if NIST or a similar organization has a
publicly-available die- or wafer-level design file with a complete set
of stress-related metrology structures, of course getting the URL to
that resource would be terrific.
Thanks in advance.
Al Henning
------------
Albert K. Henning, PhD
Director of MEMS Technology
NanoINK, Inc.
215 E. Hacienda Avenue
Campbell, CA 95008
408-379-9069
[email protected]
http://www.NanoINK.net
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